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alchetron.com
Sputter deposition - Alchetron, The Free Social Encyclopedia
Sputter deposition is a physical vapor deposition (PVD) method of thin film deposition by sputtering. This involves ejecting material from a target that is a source onto a substrate such as a silicon wafer. Resputtering is reemission of the deposited material during the deposition process by io
Jun 26, 2018
Sputtering Process
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